A representative AES spectrum illustrating the number of emitted electrons, N, as a function of kinetic energy, E, in direct form (red) and in differentiated form (black) is shown in Figure \(\PageIndex\) Analysis of a Sn-Nb wire. In addition, a typical analysis spot size is roughly 10 nm. In AES, the collection depth is limited to 1-5 nm due to the small escape depth of electrons, which permits analysis of the first 2 - 10 atomic layers. It is not a function of the excitation source as in XPS. In AES, the sample depth is dependent on the escape energy of the electrons. The main difference is that XPS uses an X-ray beam to eject an electron while AES uses an electron beam to eject an electron. It uses the energy of emitted electrons to identify the elements present in a sample, similar to X-ray photoelectron spectroscopy (XPS). Auger electron spectroscopy (AES) is one of the most commonly employed surface analysis techniques.
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